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§98.7. What standardized methods are incorporated by reference into this part? — Inbound Citations

40 C.F.R. § 98.7

Cited by 53 regulations in release Current.

Citations to 40 C.F.R. § 98.7 as a whole

  • (i) ASTM E1941-04, Standard Test Method for Determination of Carbon in Refractory and Reactive Metals and Their Alloys (incorporated by reference, see § 98.7) for analysis of metal ore and alloy product.
  • (A) U.S. Environmental Protection Agency, Emission Inventory Improvement Program, Volume II: Chapter 16, Methods for Estimating Air Emissions from Chemical Manufacturing Facilities, August 2007, Final (incorporated by reference, see § 98.7).
  • (ii) Acceptable methods include but are not limited to EPA Method 2, 2A, 2B, 2C, 2D, 2F, or 2G in Appendix A-1 of 40 CFR part 60. Alternatives that may be used for determining flow rates include OTM-24 (incorporated by reference, see § 98.7) and ALT-012 (incorporated by reference, see § 98.7).
  • (b) Unless you use the default value of 1.0, you must measure carbonate-based mineral mass fractions at least annually to verify the mass fraction data provided by the supplier of the raw material; such measurements shall be based on sampling and chemical analysis using consensus standards that specify X-ray fluorescence. For measurements made in years prior to the emissions reporting year 2014, you may also use ASTM D3682-01 (Reapproved 2006) Standard Test Method for Major and Minor Elements in Combustion Residues from Coal Utilization Processes or ASTM D6349-09 Standard Test Method for Determination of Major and Minor Elements in Coal, Coke, and Solid Residues from Combustion of Coal and Coke by Inductively Coupled Plasma—Atomic Emission Spectrometry (both incorporated by reference, see § 98.7).
  • (i) ASTM D1945-03 Standard Test Method for Analysis of Natural Gas by Gas Chromatography (incorporated by reference, see § 98.7).
  • (i) ASTM C25-06, Standard Test Methods for Chemical Analysis of Limestone, Quicklime, and Hydrated Lime (incorporated by reference, see § 98.7) for limestone, dolomite, and slag.
  • (i) ASTM E1941-04, Standard Test Method for Determination of Carbon in Refractory and Reactive Metals and Their Alloys (incorporated by reference, see § 98.7) for analysis of metal ore and alloy product.
  • (1) ASTM C25-06 Standard Test Methods for Chemical Analysis of Limestone, Quicklime, and Hydrated Lime (incorporated by reference—see § 98.7).
  • (2) ASTM D6348-03 Standard Test Method for Determination of Gaseous Compounds by Extractive Direct Interface Fourier Transform Infrared (FTIR) Spectroscopy (incorporated by reference in § 98.7).
  • (iv) If you are utilizing the tier 2 default efficiencies in paragraph (n)(2)(ii) of this section and are not subject to 40 CFR subpart OOOOb or an applicable approved state or applicable federal plan under part 62 of this chapter that requires 95 percent reduction in methane emissions, you may conduct a performance test using EPA OTM-52 (incorporated by reference, see § 98.7) as an alternative to conducting a performance test using the methods specified in § 60.5413b of this chapter, or in an applicable approved state plan or applicable Federal plan in part 62 of this chapter. If the combustion efficiency obtained using OTM-52 is equal to or greater than 93.5 percent, then use a default destruction efficiency of 95 percent and a default combustion efficiency of 93.5 percent. If you utilize OTM-52 for the testing, you must comply with all the applicable monitoring, compliance, and recordkeeping requirements identified in paragraph (n)(1)(ii) of this section.
  • (3) ASTM D6348-12 (Reapproved 2020) (incorporated by reference, see § 98.7).
  • Except as provided in this section, all terms used in this subpart have the same meaning given in the Clean Air Act and subpart A of this part.
  • (1) Operate, maintain, and calibrate belt scales or other weighing devices as described in Specifications, Tolerances, and Other Technical Requirements for Weighing and Measuring Devices NIST Handbook 44 (2009) (incorporated by reference, see § 98.7), or follow procedures specified by the measurement device manufacturer. You must recalibrate each weighing device according to one of the following frequencies. You may recalibrate either at the minimum frequency specified by the manufacturer or biennially (i.e., once every two years).
  • (1) For storage tanks other than those processing unstabilized crude oil, you must either calculate CH4 emissions from storage tanks that have a vapor-phase methane concentration of 0.5 volume percent or more using tank-specific methane composition data (from measurement data or product knowledge) and the emission estimation methods provided in AP 42, Section 7.1 (incorporated by reference, see § 98.7) or estimate CH4 emissions from storage tanks using Equation Y-22 of this section.
  • (2) ASTM D1945-03 Standard Test Method for Analysis of Natural Gas by Gas Chromatography (incorporated by reference, see § 98.7).
  • (i) The method used to calculate the reported storage tank emissions for storage tanks other than those processing unstabilized crude (i.e., either AP 42, Section 7.1 (incorporated by reference, see § 98.7), or Equation Y-22 of this section).
  • (1) High heat values of black liquor must be determined no less than annually using T684 om-06 Gross Heating Value of Black Liquor, TAPPI (incorporated by reference, see § 98.7). If measurements are performed more frequently than annually, then the high heat value used in Equation AA-1 of this subpart must be based on the average of the representative measurements made during the year.
  • (c) Basis for determining the annual mass of the spent liquor solids combusted (whether based on T650 om-05 Solids Content of Black Liquor, TAPPI (incorporated by reference, see § 98.7) or an online measurement system).
  • (d) Annual quantity of spent liquor solids combusted in each chemical recovery furnace and chemical recovery combustion unit, and the basis for determining the annual quantity of the spent liquor solids combusted (whether based on T650 om-05 Solids Content of Black Liquor, TAPPI (incorporated by reference, see § 98.7) or an online measurement system). If an online measurement system is used, you must retain records of the calculations used to determine the annual quantity of spent liquor solids combusted from the continuous measurements.
  • (c) For CO2 process emissions, you must determine the monthly carbon content of the petroleum coke using reports from the supplier. Alternatively, facilities can measure monthly carbon contents of the petroleum coke using ASTM D3176-89 (Reapproved 2002) Standard Practice for Ultimate Analysis of Coal and Coke (incorporated by reference, see § 98.7) and ASTM D5373-08 Standard Test Methods for Instrumental Determination of Carbon, Hydrogen, and Nitrogen in Laboratory Samples of Coal (incorporated by reference, see § 98.7).
  • (1) Determine the monthly inorganic carbon content of the trona from a weekly composite analysis for each soda ash manufacturing line, using a modified version of ASTM E359-00 (Reapproved 2005)e1, Standard Test Methods for Analysis of Soda Ash (Sodium Carbonate) (incorporated by reference, see § 98.7). ASTM E359-00(Reapproved 2005) e1 is designed to measure the total alkalinity in soda ash not in trona. The modified method referred to above adjusts the regular ASTM method to express the results in terms of trona. Although ASTM E359-00 (Reapproved 2005) e1 uses manual titration, suitable autotitrators may also be used for this determination.
  • (c) You must determine the carbon content of the calcined petroleum coke each month based on reports from the supplier. Alternatively, facilities can measure monthly carbon contents of the petroleum coke using ASTM D3176-89 (Reapproved 2002) Standard Practice for Ultimate Analysis of Coal and Coke (incorporated by reference, see § 98.7) and ASTM D5373-08 Standard Test Methods for Instrumental Determination of Carbon, Hydrogen, and Nitrogen in Laboratory Samples of Coal (incorporated by reference, see § 98.7).
  • (1) Carbon content factor for petroleum coke consumed in month from the supplier or as measured by the applicable method incorporated by reference in § 98.7 according to § 98.314(c) (percent by weight, expressed as a decimal fraction) (Equation EE-2 of § 98.313).
  • (1) Collect quarterly or more frequent grab samples (with no fewer than 6 weeks between measurements) for methane concentration and make quarterly measurements of flow rate, temperature, pressure, and, if applicable, moisture content. The sampling and measurements must be made at the same locations as Mine Safety and Health Administration (MSHA) inspection samples are taken, and should be taken when the mine is operating under normal conditions. You must follow MSHA sampling procedures as set forth in the MSHA Handbook entitled, Coal Mine Safety and Health General Inspection Procedures Handbook, Handbook Number: PH16-V-1 (incorporated by reference, see § 98.7). You must record the date of sampling, flow, temperature, pressure, and moisture measurements, the methane concentration (percent), the bottle number of samples collected, and the location of the measurement or collection.
  • (i) Using ASTM E1941-04 Standard Test Method for Determination of Carbon in Refractory and Reactive Metals and Their Alloys (incorporated by reference, see § 98.7), analyze zinc bearing materials.
  • (d) Except as otherwise provided in § 98.33(e)(3)(iv), when municipal solid waste (MSW) is either the primary fuel combusted in a unit or the only fuel with a biogenic component combusted in the unit, determine the biogenic portion of the CO2 emissions using ASTM D6866-16 and ASTM D7459-08 (both incorporated by reference, see § 98.7). Perform the ASTM D7459-08 sampling and the ASTM D6866-16 analysis at least once in every calendar quarter in which MSW is combusted in the unit. Collect each gas sample during normal unit operating conditions for at least 24 total (not necessarily consecutive) hours, or longer if the facility deems it necessary to obtain a representative sample. Notwithstanding this requirement, if the types of fuels combusted and their relative proportions are consistent throughout the year, the minimum required sampling time may be reduced to 8 hours if at least two 8-hour samples and one 24-hour sample are collected under normal operating conditions, and arithmetic average of the biogenic fraction of the flue gas from the 8-hour samples (expressed as a decimal) is within ±5 percent of the biogenic fraction from the 24-hour test. There must be no overlapping of the 8-hour and 24-hour test periods. Document the results of the demonstration in the unit's monitoring plan. If the types of fuels and their relative proportions are not consistent throughout the year, an optional sampling approach that facilities may wish to consider to obtain a more representative sample is to collect an integrated sample by extracting a small amount of flue gas (e.g., 1 to 5 cc) in each unit operating hour during the quarter. Separate the total annual CO2 emissions into the biogenic and non-biogenic fractions using the average proportion of biogenic emissions of all samples analyzed during the reporting year. Express the results as a decimal fraction (e.g., 0.30, if 30 percent of the CO2 is biogenic). When MSW is the primary fuel for multiple units at the facility, and the units are fed from a common fuel source, testing at only one of the units is sufficient.
  • (a) Mass measurement equipment used to determine the quantity of waste landfilled on or after January 1, 2010 must meet the requirements for weighing equipment as described in “Specifications, Tolerances, and Other Technical Requirements For Weighing and Measuring Devices” NIST Handbook 44 (2009) (incorporated by reference, see § 98.7).
  • (c) You must collect samples representing wastewater influent to the anaerobic wastewater treatment process, following all preliminary and primary treatment steps (e.g., after grit removal, primary clarification, oil-water separation, dissolved air flotation, or similar solids and oil separation processes). You must collect and analyze samples for COD or BOD5 concentration at least once each calendar week that the anaerobic wastewater treatment process is operating; if only one measurement is made each calendar week, there must be at least three days between measurements. You must collect a sample that represents the average COD or BOD5 concentration of the waste stream over a 24-hour sampling period. You must collect a minimum of four sample aliquots per 24-hour period and composite the aliquots for analysis. Collect a flow-proportional composite sample (either constant time interval between samples with sample volume proportional to stream flow, or constant sample volume with time interval between samples proportional to stream flow). Follow sampling procedures and techniques presented in Chapter 5, Sampling, of the “NPDES Compliance Inspection Manual,” (incorporated by reference, see § 98.7) or Section 7.1.3, Sample Collection Methods, of the “U.S. EPA NPDES Permit Writers' Manual,” (incorporated by reference, see § 98.7).
  • (x) When ASTM methods D7459-08 and D6866-16 (both incorporated by reference, see § 98.7) are used to determine the biogenic portion of the annual CO2 emissions from MSW combustion, as described in § 98.34(d), report:
    (A) The results of each quarterly sample analysis, expressed as a decimal fraction (e.g., if the biogenic fraction of the CO2 emissions from MSW combustion is 30 percent, report 0.30).
  • (c) The CH4 concentration of gas from digesters must be determined using ASTM D1946-90 (Reapproved 2006) Standard Practice for Analysis of Reformed Gas by Gas Chromatography (incorporated by reference see § 98.7). All gas composition monitors shall be calibrated prior to the first reporting year for biogas methane and carbon dioxide content using ASTM D1946-90 (Reapproved 2006) Standard Practice for Analysis of Reformed Gas by Gas Chromatography (incorporated by reference see § 98.7)and recalibrated either annually or at the minimum frequency specified by the manufacturer, whichever is more frequent, or whenever the error in the midrange calibration check exceeds ±10 percent. All monitors shall be maintained as specified by the manufacturer.
  • (1) Use a quality-assured analytical measurement technology capable of detecting the analyte of interest at the concentration of interest and use a procedure validated with the analyte of interest at the concentration of interest. Where standards for the analyte are not available, a chemically similar surrogate may be used. Acceptable analytical measurement technologies include but are not limited to gas chromatography (GC) with an appropriate detector, infrared (IR), fourier transform infrared (FTIR), and nuclear magnetic resonance (NMR). Acceptable methods include EPA Method 18 in appendix A-1 of 40 CFR part 60; EPA Method 320 in appendix A of 40 CFR part 63; the Protocol for Measuring Destruction or Removal Efficiency (DRE) of Fluorinated Greenhouse Gas Abatement Equipment in Electronics Manufacturing, Version 1, EPA-430-R-10-003, (March 2010) (incorporated by reference, see § 98.7); ASTM D6348-03 Standard Test Method for Determination of Gaseous Compounds by Extractive Direct Interface Fourier Transform Infrared (FTIR) Spectroscopy (incorporated by reference, see § 98.7); or other analytical methods validated using EPA Method 301 in appendix A of 40 CFR part 63 or some other scientifically sound validation protocol. The validation protocol may include analytical technology manufacturer specifications or recommendations.
  • (2) Determine the percent total solids and the percent volatile solids of each sample following Standard Method 2540G “Total, Fixed, and Volatile Solids in Solid and Semisolid Samples” (incorporated by reference; see § 98.7).
  • (c) If you report under subpart VV of this part for a well or group of wells, you shall not report under this subpart for that well or group of wells. If you previously met the source category definition for subpart UU of this part for a project where CO2 is injected in enhanced recovery operations for oil and other hydrocarbons (CO2-EOR) and then began using the standard designated as CSA/ANSI ISO 27916:19 (incorporated by reference, see § 98.7) such that you met the definition of the source category for subpart VV during a reporting year, you must report under subpart UU for the portion of the year before you began using CSA/ANSI ISO 27916:19 and report under subpart VV for the portion of the year after you began using CSA/ANSI ISO 27916:19.
  • (1) 19, (incorporated by reference, see § 98.7) as a method of quantifying geologic sequestration of CO2 in association with EOR operations.
  • (a) You must report under this subpart if your CO2-EOR project uses CSA/ANSI ISO 27916:19 (incorporated by reference, see § 98.7) as a method of quantifying geologic sequestration of CO2 in association with CO2-EOR operations. There is no threshold for reporting.
  • You must report the following from Clause 8 of CSA/ANSI ISO 27916:19 (incorporated by reference, see § 98.7):
  • You must calculate CO2 sequestered using the following quantification principles from Clause 8.2 of CSA/ANSI ISO 27916:19 (incorporated by reference, see § 98.7).
  • You must use the applicable monitoring and quality assurance requirements set forth in Clause 6.2 of CSA/ANSI ISO 27916:19 (incorporated by reference, see § 98.7).
  • Whenever the value of a parameter is unavailable or the quality assurance procedures set forth in § 98.484 cannot be followed, you must follow the procedures set forth in Clause 9.2 of CSA/ANSI ISO 27916:19 (incorporated by reference, see § 98.7).
  • (g) Annual documentation that contains the following components as described in Clause 4.4 of CSA/ANSI ISO 27916:19 (incorporated by reference, see § 98.7):
    (1) The formulas used to quantify the annual mass of associated storage, including the mass of CO2 delivered to the CO2-EOR project and losses during the period covered by the documentation (see Clause 8 and Annex B of CSA/ANSI ISO 27916:19 (incorporated by reference, see § 98.7)).
    (2) The methods used to estimate missing data and the amounts estimated as described in Clause 9.2 of CSA/ANSI ISO 27916:19 (incorporated by reference, see § 98.7).
    (3) The approach and method for quantification utilized by the operator, including accuracy, precision, and uncertainties (see Clause 8 and Annex B of CSA/ANSI ISO 27916:19 (incorporated by reference, see § 98.7)).
    (4) A statement describing the nature of validation or verification including the date of review, process, findings, and responsible person or entity.
    (5) Source of each CO2 stream quantified as associated storage (see Clause 8.3 of CSA/ANSI ISO 27916:19 (incorporated by reference, see § 98.7)).
    (6) A description of the procedures used to detect and characterize the total CO2 leakage from the EOR complex.
    (7) If only the mass of anthropogenic CO2 is considered for mstored, a description of the derivation and application of anthropogenic CO2 allocation ratios for all the terms described in Clauses 8.1 to 8.4.6 of CSA/ANSI ISO 27916:19 (incorporated by reference, see § 98.7).
    (8) Any documentation provided by a qualified independent engineer or geologist, who certifies that the documentation provided, including the mass balance calculations as well as information regarding monitoring and containment assurance, is accurate and complete.
  • You must follow the record retention requirements specified by § 98.3(g). In addition to the records required by § 98.3(g), you must comply with the record retention requirements in Clause 9.1 of CSA/ANSI ISO 27916:19 (incorporated by reference, see § 98.7).
  • (a) You must prepare and update, as necessary, a general EOR operations management plan that provides a description of the EOR complex and engineered system (see Clause 4.3(a) of CSA/ANSI ISO 27916:19 (incorporated by reference, see § 98.7)), establishes that the EOR complex is adequate to provide safe, long-term containment of CO2, and includes site-specific and other information including:
    (5) 19 (incorporated by reference, see § 98.7).
  • Except as provided in paragraphs (a) and (b) of this section, all terms used in this subpart have the same meaning given in the Clean Air Act and subpart A of this part.
  • (b) Determine the mass of petroleum coke monthly as required by equation 1 to § 98.493(b)(2) using mass measurement equipment meeting the requirements for commercial weighing equipment as described in NIST HB 44-2023 (incorporated by reference, see § 98.7). Calibrate the measurement device according to the procedures specified by NIST HB 44-2023 (incorporated by reference, see § 98.7) or the procedures specified by the manufacturer. Recalibrate either biennially or at the minimum frequency specified by the manufacturer.
  • (i) ASTM D5373-08 (incorporated by reference, see § 98.7), for analysis of carbonaceous reducing agents and carbon electrodes.
  • (2) ASTM D6348-03 Standard Test Method for Determination of Gaseous Compounds by Extractive Direct Interface Fourier Transform Infrared (FTIR) Spectroscopy (incorporated by reference, see § 98.7); or
  • All terms used in this part shall have the same meaning given in the Clean Air Act and in this section.
  • (a) Effective December 31, 2010 for smelters with no prior measurement or effective December 31, 2012, for facilities with historic measurements, the smelter-specific slope coefficients, overvoltage emission factors, and weight fractions used in Equations F-2, F-3, and F-4 of this subpart must be measured in accordance with the recommendations of the EPA/IAI Protocol for Measurement of Tetrafluoromethane (CF4) and Hexafluoroethane (C2F6) Emissions from Primary Aluminum Production (2008) (incorporated by reference, see § 98.7), except the minimum frequency of measurement shall be every 10 years unless a change occurs in the control algorithm that affects the mix of types of anode effects or the nature of the anode effect termination routine.Facilities which operate at less than 0.2 anode effect minutes per cell day or operate with less than 1.4mV anode effect overvoltage can use either smelter-specific slope coefficients or the technology specific default values in Table F-1 of this subpart.
  • (1) ASTM D1945-03 Standard Test Method for Analysis of Natural Gas by Gas Chromatography (incorporated by reference, see § 98.7).
  • (a) You must determine the weight fraction of total CaO and total MgO in CKD not recycled to the kiln from each kiln using ASTM C114-09, Standard Test Methods for Chemical Analysis of Hydraulic Cement (incoporated by reference, see § 98.7). The monitoring must be conducted quarterly for each kiln from a CKD sample drawn either as CKD is exiting the kiln or from bulk CKD storage.
  • (e) If you use HC fuel CECS purchased and installed on or after January 1, 2025 to control emissions from tools that use either NF3 as an input gas in remote plasma cleaning processes or F2 as an input gas in any process, and if you use a value less than 1 for either aF2,j or aNF3,RPC in equation I-9 to § 98.93, you must certify and document that the model for each of the systems for which you are claiming that it does not form CF4 from F2 has been tested and verified to produce less than 0.1% CF4 from F2 and that each of the systems is installed, operated, and maintained in accordance with the directions of the HC fuel CECS manufacturer. Hydrocarbon-fuel-based combustion emissions control systems include but are not limited to abatement systems as defined in § 98.98 that are hydrocarbon-fuel-based. The rate of conversion from F2 to CF4 must be measured using a scientifically sound, industry-accepted method that accounts for dilution through the abatement device, such as EPA 430-R-10-003 (incorporated by reference, see § 98.7), adjusted to calculate the rate of conversion from F2 to CF4 rather than the DRE. Either the HC fuel CECS manufacturer or the electronics manufacturer may perform the measurement. The flow rate of F2 into the tested HC fuel CECS may be metered using a calibrated mass flow controller.
  • (b) If you use HC fuel CECS purchased and installed on or after January 1, 2025, to control emissions from tools that use either NF3 as an input gas in remote plasma cleaning processes or F2 as an input gas in any process, and if you use a value less than 1 for either aF2,j or aNF3,RPC in equation I-9 to § 98.93, certification and documentation that the model for each of the systems that you claim does not form CF4 from F2 has been tested and verified to produce less than 0.1% CF4 from F2, and certification that the site maintenance plan includes the HC fuel CECS manufacturer's recommendations and specifications for installation, operation, and maintenance of those systems. If you are relying on your own testing to make the certification that the model produces less than 0.1% CF4 from F2, the documentation must include the model tested, the method used to perform the testing (e.g., EPA 430-R-10-003, modified to calculate the formation rate of CF4 from F2 rather than the DRE), complete documentation of the results of any initial and subsequent tests, and a final report similar to that specified in EPA 430-R-10-003 (incorporated by reference, see § 98.7), with appropriate adjustments to reflect the measurement of the formation rate of CF4 from F2 rather than the DRE. If you are relying on testing by the HC fuel CECS manufacturer to make the certification that the system produces less than 0.1% CF4 from F2, the documentation must include the model tested, the method used to perform the testing, and the results of the test.
  • (4) The fluorinated GHG is not an expected or possible by-product identified in Table I-17 of this subpart.
    Maximum substrate starts means for the purposes of Equation I-5 of this subpart, the maximum quantity of substrates, expressed as surface area, that could be started each month during a reporting year based on the equipment installed in that facility and assuming that the installed equipment were fully utilized. Manufacturing equipment is considered installed when it is on the manufacturing floor and connected to required utilities.
    Modeled gas consumed means the quantity of gas used during wafer/substrate processing over some period based on a verified facility-specific engineering model used to apportion gas consumption.
    Nameplate capacity means the full and proper charge of chemical specified by the equipment manufacturer to achieve the equipment's specified performance. The nameplate capacity is typically indicated on the equipment's nameplate; it is not necessarily the actual charge, which may be influenced by leakage and other emissions.
    Operational mode means the time in which an abatement system is properly installed, maintained, and operated according to the site maintenance plan for abatement systems as required in § 98.94(f)(1) and defined in § 98.97(d)(9). This includes being properly operated within the range of parameters as specified in the site maintenance plan for abatement systems. For abatement systems purchased and installed on or after January 1, 2025, this includes being properly operated within the range of parameters specified in the DRE certification documentation. An abatement system is considered to not be in operational mode when it is not operated and maintained according to the site maintenance plan for abatement systems or, for abatement systems purchased and installed on or after January 1, 2025, not operated within the range of parameters as specified in the DRE certification documentation.
    Plasma etching is a process type that consists of any production process using fluorinated GHG reagents to selectively remove materials from a substrate during electronics manufacturing. The materials removed may include SiO2, SiOX-based or fully organic-based thin-film material, SiN, SiON, Si3N4, SiC, SiCO, SiCN, etc. (represented by the general chemical formula, SiwOXNyXz where w, x, y and z are zero or integers and X may be some other element such as carbon), substrate, or metal films (such as aluminum or tungsten).
    Process sub-type is a set of similar manufacturing steps, more closely related within a broad process type. For example, the chamber cleaning process type includes in-situ plasma chamber cleaning, remote plasma chamber cleaning, and in-situ thermal chamber cleaning sub-types.
    Process types are broad groups of manufacturing steps used at a facility associated with substrate (e.g., wafer) processing during device manufacture for which fluorinated GHG emissions and fluorinated GHG consumption is calculated and reported. The process types are Plasma etching/Wafer Cleaning and Chamber cleaning.
    Properly measured destruction or removal efficiency means destruction or removal efficiencies measured in accordance with EPA 430-R-10-003 (incorporated by reference, see § 98.7), and, if applicable, Appendix A to this subpart, or by an alternative method approved by the Administrator as specified in § 98.94(k).
    The Random Sampling Abatement System Testing Program (RSASTP) means the required frequency for measuring the destruction or removal efficiencies of abatement systems in order to apply properly measured destruction or removal efficiencies to report controlled emissions.
    Redundant abatement systems means a system that is specifically designed, installed and operated for the purpose of destroying fluorinated GHGs and N2O gases, or for which the destruction or removal efficiency for a fluorinated GHG or N2O has been properly measured according to the procedures under § 98.94(f)(4), and that is used as a backup to the main fluorinated GHGs and N2O abatement system during those times when the main system is not functioning or operating in accordance with design and operating specifications.
    Repeatable means that the variables used in the formulas for the facility's engineering model for gas apportioning factors are based on observable and measurable quantities that govern gas consumption rather than engineering judgment about those quantities or gas consumption.
    Representative operating levels means (for purposes of verification of the apportionment model or for determining the appropriate conditions for stack testing) operating the fab, in terms of substrate starts for the period of testing or monitoring, at no less than 50 percent of installed production capacity or no less than 70 percent of the average production rate for the reporting year, where production rate for the reporting year is represented in average monthly substrate starts. For the purposes of stack testing, the period for determining the representative operating level must be the period ending on the same date on which testing is concluded.
    Stack system means one or more stacks that are connected by a common header or manifold, through which a fluorinated GHG-containing gas stream originating from one or more fab processes is, or has the potential to be, released to the atmosphere. For purposes of this subpart, stack systems do not include emergency vents or bypass stacks through which emissions are not usually vented under typical operating conditions.
    Trigger point for change out means the residual weight or pressure of a gas container type that a facility uses as an indicator that operators need to change out that gas container with a full container. The trigger point is not the actual residual weight or pressure of the gas remaining in the cylinder that has been replaced.
    Unabated emissions means a gas stream containing fluorinated GHG or N2O that has exited the process, but which has not yet been introduced into an abatement system to reduce the mass of fluorinated GHG or N2O in the stream. If the emissions from the process are not routed to an abatement system, or are routed to an abatement device that is not in an operational mode, unabated emissions are those fluorinated GHG or N2O released to the atmosphere.
    Uptime means the ratio of the total time during which the abatement system is in an operational mode, to the total time during which production process tool(s) connected to that abatement system are normally in operation.
    Wafer cleaning is a process type that consists of any production process using fluorinated GHG reagents to clean wafers at any step during production.
    Wafer passes is a count of the number of times a wafer substrate is processed in a specific process sub-type, or type. The total number of wafer passes over a reporting year is the number of wafer passes per tool multiplied by the number of operational process tools in use during the reporting year.
    Wafer starts means the number of fresh wafers that are introduced into the fabrication sequence each month. It includes test wafers, which means wafers that are exposed to all of the conditions of process characterization, including but not limited to actual etch conditions or actual film deposition conditions.