§63.7180. What is the purpose of this subpart?
40 C.F.R. § 63.7180
This subpart establishes national emission standards for hazardous air pollutants (NESHAP) for semiconductor manufacturing facilities. This subpart also establishes requirements to demonstrate initial and continuous compliance with the emission standards.
Notes, amendments, and revision history
Source
Source: 68 FR 27925, May 22, 2003, unless otherwise noted.
Authority
Authority: 42 U.S.C. 7401 et seq.
Source
Source: 57 FR 61992, Dec. 29, 1992, unless otherwise noted.