---
kind: "section"
citation: "40 C.F.R. § 63.7188"
title: "40"
number: "63.7188"
heading: "What are my monitoring installation, operation, and maintenance requirements?"
url: "https://uscodex.org/cfr/40/63.7188"
---

# §63.7188. What are my monitoring installation, operation, and maintenance requirements?


If you comply with the emission limitations of [§ 63.7184](/cfr/40/63.7184.md) by venting the emissions of your semiconductor process vent through a closed vent system to a control device, you must comply with the requirements of paragraphs [(a)](#a) and [(b)](#b) of this section.

- (a) You must meet the applicable general monitoring, installation, operation, and maintenance requirements specified in [§ 63.996](/cfr/40/63.996.md).
- (b) You must meet the monitoring, installation, operation, and maintenance requirements specified for closed vent systems and applicable control devices in [§§ 63.983 through 63.995](/cfr/40/63.983..63.995.md). If you used the design evaluation procedure in [§ 63.7187(i)](/cfr/40/63.7187.md?p=i) to demonstrate compliance, you must use the information from the design evaluation to establish the operating parameter level for monitoring of the control device.

## Notes

### Source

Source: 68 FR 27925, May 22, 2003, unless otherwise noted.

### Authority

Authority: 42 U.S.C. 7401 et seq.

### Source

Source: 57 FR 61992, Dec. 29, 1992, unless otherwise noted.