---
kind: "section"
citation: "40 C.F.R. § 63.7180"
title: "40"
number: "63.7180"
heading: "What is the purpose of this subpart?"
url: "https://uscodex.org/cfr/40/63.7180"
---

# §63.7180. What is the purpose of this subpart?


This subpart establishes national emission standards for hazardous air pollutants (NESHAP) for semiconductor manufacturing facilities. This subpart also establishes requirements to demonstrate initial and continuous compliance with the emission standards.


## Notes

### Source

Source: 68 FR 27925, May 22, 2003, unless otherwise noted.

### Authority

Authority: 42 U.S.C. 7401 et seq.

### Source

Source: 57 FR 61992, Dec. 29, 1992, unless otherwise noted.